激光三角位移传感器光斑自检法研究

ResearchonBeamSpeckleSelfmeasuringMethodofLaserTriangulationDisplacementSensor

摘要:

本文根据激光三角位移传感器的结构特点，提出了利用传感器自身光路和光电探测器的激光三角位移传感器光斑自检测以感器入射光斑的半径。

Abstract:

Accordingtothestructurefeatureoflasertriangulationdisplacementsensor,beamspeckleselfmeasuringmethodoflasertriangulationdisplacementsensorisdevelopedbyusingtheopticalpathandthephotonicsdetectoroflasertriangledisplacementsensoritself.Theradiusofthemeasuredbeamspecklecanbevariedfrom50mto5mm,themeasurementresolutionofthesensoris1m.Thismethodhasthecharactersofsimplefyingtheapparatusandadjustingconveniently.Theexperimentalresultshowsthatthetechniqueisrealizable.