Abstract:Mode refractive index and mode field distribution of metal-clad 5-layer slab waveguide and rectangular waveguide were investigated utilizing finite element method(FEM).The dependency of mode refractive index on thickness of core layer,buffer layer and metal layer of slab waveguide and thickness of buffer layer and core layer,and width of core layer of rectangular waveguide was calculated respectively.The phenomena of TM mode evolution during the variation of the thickness of buffer layers was observed.Furthermore,multiple plasma surface modes is observed in 2-dimensional rectangular waveguide.Mode field distribution during the cause of mode evolution of slab waveguide and that of plasma surface mode of rectangular waveguide is given.The concept of mode evolution and multiple plasma surface modes are not reported before.