基于Intel 8254的准分子激光外触发器的研究

Development of Excimer Laser External Trigger Based on Intel 8254

摘要:

介绍了一种利用可编程Intel 8254定时器计数器在微机上实现准分子激光微加工过程激光外触发控制的新方法。针对准分子激光的光刻直写技术的需求特点对所使用的分频器以及8254的组合工作方式进行了研究，并在实际应用中对该外触发器的优势进行了分析。结果表明，由此方法制作的准分子激光外触发控制器具有性能可靠、结构简单和可编程控制等特点。

Abstract:

A new control method of excimer laser external trigging used in micro fabrication was presented,which is based on Intel 8254 and computer control technology.According to the requirement of excimer laser direct drawing process,the frequency divider and 8254 compound work mode were discussed.The advantages of external trigger were analyzed during practical application.The external trigger has the characteristics of reliable performance,simple construction and programmable controlling.