高斯-涡旋光束干涉非接触振动测量研究

Research on Non-contact Vibration Measurement Technology Based on Gaussian Beam -Vortex Beam Interference

摘要:

摘要：研究了基于涡旋光束干涉原理的小振幅振动非接触测量技术。综述分析了现有的基于涡旋光束干涉的光学测量技术现状，并指出现有方案在实际应用中可能存在的涡旋光束易受像差影响、采样速率较低、探测距离受限等问题。针对前期研究中存在的这些问题，提出以高斯光束作为探测光束，而将涡旋光束作为参考光束的干涉测振构型（OAM-GS），针对探测光在待测物体表面反射以及传播过程中引入的像差对干涉图样的影响，采用了对返回的的探测光进行空间滤波后再进行干涉测量的方法，有效滤除静态像差引起的干涉图样畸变，并在实验研究中，采用4f成像光路制备具有高斯光强分布的涡旋参考光，实现探测光与参考光模式的优化匹配。此外，提出采用高速线阵相机作为探测器件的相位提取方案，可以提升系统的采集速率。最后搭建实验光路，并利用压电镜架作为驱动源，测量了作为探测目标的光学镜面的低频振动信息。

Abstract:

Abstract: The non-contact measurement technology of small amplitude vibration based on vortex beam interference principle is studied. The current status of optical measurement technology based on vortex beam interference is reviewed and analyzed. Aiming at these problems existing in the previous research, an interferometric vibration measurement configuration (OAM-GS) is proposed, which uses a Gaussian beam as the detection beam and a vortex beam as the reference beam. In view of the impact of the aberration introduced by the detection light in the target surface reflection and propagation process on the interference pattern, the method of spatial filtering the returned detection light before interferometric measurement is adopted to effectively filter out the interference pattern distortion caused by static aberration. In the experimental research, the 4f imaging optical path is used to prepare the vortex reference light with a Gaussian light intensity distribution to achieve the optimal matching of the detection light and the reference light mode. In addition, a phase extraction scheme using high-speed linear array camera as the detection device is proposed, which can improve the acquisition rate of the system. Finally, the experimental optical path is built, and the piezoelectric mirror frame is used as the driving source to measure the low-frequency vibration information of the optical mirror as the detection target.